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    陶瓷修整环Ceramic Grinding Ring

    • 发布时间:2021-01-01
    • 浏览:

    陶瓷修整环Ceramic Grinding Ring(图1)

    主要特点:

    陶瓷修整环由高纯氧化铝粉烧结而成,具有硬度高,精度高,形状保持性好,无需修整、寿命长等特点,特别适用于晶圆或芯片等精度要求高的产品的研磨抛光制程,能够实现对研磨盘的在线高精修整和对研磨液的均匀分散。

    Main features

    The ceramic grinding ring is made of high-purity alumina powder, It has high hardness, high precision,good shape retention, no need for dressing and long life. It is especially suitable for the grinding and polishing process of products with high precision such as wafer or chip. It can realize on-line high-precision dressing of the grinding disc and uniform dispersion of the grinding liquid.

     

    应用领域:

    主要应用于LED 衬底片、外延片的背面研磨、抛光制程,配套设备主要有创技、NTS、凯勒斯、捷斯奥等厂家的研磨机、抛光机。

    Application

    It is mainly used in the back grinding and polishing process of LED substrate sheets and epitaxial wafers. The supporting equipments mainly include grinding machines and polishing machines from manufacturers such as Speedfam,NTS, Galaxies and WEC.

     

    规格型号:

    我公司可按标准Q/ZMS 029—2008 提供陶瓷修整环,外径范围:φ182-576 mm,并可根据用户要求设计和制造各种非标产品。

    Specification:

    Our company can provide ceramic trim ring according to standard Q/ZMS 029-2008, the outer diameter range: φ182-576 mm, and can design and manufacture various non-standard products according to user requirements.

     

    陶瓷修整环规格及精度

    Model specification and the precision for ceramic ring

    陶瓷修整环Ceramic Grinding Ring(图2)

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