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    陶瓷载盘Ceramic Holder

    • 发布时间:2021-01-01
    • 浏览:

    陶瓷载盘Ceramic Holder(图1)

    主要特点:

    陶瓷载盘采用高纯超细氧化铝粉体经高温烧制而成,具有纯度高、杂质少、硬度高、耐磨耐腐蚀等特点,并且产品精度高、热膨胀系数小、精度保持性好,适用于半导体晶圆材料的超精密加工。

    Main features

    Ceramic Holder is made of high purity and ultra-fine alumina powder by high temperature firing. It has the characteristics of high purity, less impurities, high hardness,wear resistance and corrosion resistance. The products has high precision, small thermal expansion coefficient and good accuracy retention. It is suitable for ultra-precision processing of semiconductor wafer materials.

     

    用途:

    主要用于LED 衬底及半导体晶圆(蓝宝石片、碳化硅片、硅片、锗片、砷化镓片、氮化镓片等)及其材料晶圆及窗口片的减薄、硬抛及CMP 抛光制程。

    Application

    It is mainly used for thinning, hard polishing and CMP polishing of LED substrate and semiconductor wafers(sapphire wafer, silicon carbide wafer,silicon wafer, germanium wafer, gallium arsenide wafer, gallium nitride wafer, etc.).

     

    规格型号:

    我公司可按照客户的定制化需求提供陶瓷载盘产品,直径范围:Φ5~800mm。陶瓷载盘厚度:1~200mm, 平面度:0.001~0.002mm,并且可以根据客户的要求进行设计和制造各种非标陶瓷载盘。

    Specification:

    Our company can provide ceramic disc products according to customer's customized requirements, diameter range is Φ5~800mm. the thickness range is 1~200 mm, flatness range is 0.001~0.002 mm, and can be designed and manufactured according to customer requirements of various non-standard ceramic holder.

     

    陶瓷载盘规格及精度

    Model specification and the precision for ceramic holder

    陶瓷载盘Ceramic Holder(图2)

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