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    微孔陶瓷吸盘Fine-Pore Ceramic Chuck Tables

    • 发布时间:2021-01-01
    • 浏览:

    微孔陶瓷吸盘Fine-Pore Ceramic Chuck Tables(图1)

    微孔陶瓷吸盘是一种利用真空吸附原理固定工件的承载平台,公司生产的微孔陶瓷吸盘可以和日本、德国、以色列、美国、韩国及国产的设备配套使用,具有优越的性能价格比。

    Fine-pore ceramic chuck table is a bearing platform for fixing workpieces by the vacuum adsorption principle. These products which have high cost performance produced by the company can match with the machines made in Japan,Germany, Israel, the United States, Korea and China.

     

    微孔陶瓷吸盘Fine-Pore Ceramic Chuck Tables(图2)

    主要特点:

    微孔陶瓷吸盘具有平面度、平行度高,组织致密均匀,强度高,透气性好,吸附力均匀,易于修整等特点。

    加工对象:2、3、4、5、6、8、12 英寸半导体片。

    配套机床:减薄机、划片机、清洗机等。

    吸盘类型:微孔陶瓷

    Main characteristics:

    Fine-pore ceramic chuck table has the characteristics of high flatness and parallelism, compact and uniform structure with high strength, good permeability, uniform adsorption affinity and dressing easily.

    Workpiece processed:2,3,4,5,6,8,12 inches semiconductor wafer.

    Suitable devices: Wafer grinder, dicing machine and cleaning machine ,etc.

    Chuck type: Fine-pore ceramic

     

    型号规格:

    底座及边框可选材质:铝合金、不锈钢、陶瓷。

    尺寸范围:φ5mm-φ500mm

    微孔尺寸:5-700um

    气 孔 率:30-40%

    透气均匀性:10×10mm 区域内压差±3Kpa

    可根据用户要求设计和制造各种非标吸盘。

    Specifcations:

    Optional material for base and frame: Aluminum Alloy,Stainless Steel, Ceramics.

    Size range: φ5mm-φ500mm

    Micropore size: 5-700um

    Porosity: 30-40%

    Permeability uniformity: 10 x 10 mm pressure difference(±3 Kpa)

    We can design and make nonstandard chuck tables according to customers' requirement.

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